Systems and methods for processing semiconductor structures using laser pulses laterally distributed in a scanning window

ABSTRACT

Systems and methods process structures on or within a semiconductor substrate using a series of laser pulses. In one embodiment, a deflector is configured to selectively deflect the laser pulses within a processing window. The processing window is scanned over the semiconductor substrate such that a plurality of laterally spaced rows of structures simultaneously pass through the processing window. As the processing window is scanned, the deflector selectively deflects the series of laser pulses among the laterally spaced rows within the processing window. Thus, multiple rows of structures may be processed in a single scan.

TECHNICAL FIELD

This disclosure relates generally to manufacturing semiconductorintegrated circuits. In particular, this disclosure relates to the useof laser beams to process structures on or within a semiconductorintegrated circuit.

BACKGROUND INFORMATION

During fabrication, ICs (integrated circuits) often incur defects forvarious reasons. For that reason, IC devices are usually designed toinclude redundant circuit elements, such as spare rows and columns ofmemory cells in semiconductor memory devices, e.g., a DRAM (dynamicrandom access memory), an SRAM (static random access memory), or anembedded memory. Such devices are also designed to include particularlaser-severable links between electrical contacts of the redundantcircuit elements. Such links can be removed, for example, to disconnecta defective memory cell and to substitute a replacement redundant cell.Links may also be removed for identification, configuration and voltageadjustment. Similar techniques are also used to sever links in order toprogram or configure logic products, such as gate arrays or ASICs(application-specific integrated circuits). After an IC has beenfabricated, its circuit elements are tested for defects, and thelocations of defects may be recorded in a database. Combined withpositional information regarding the layout of the IC and the locationof its circuit elements, a laser-based link processing system can beemployed to remove selected links so as to make the IC useful.

Laser-severable links are typically about 0.5-1 microns (μm) thick,about 0.5-1 μm wide, and about 8 μm in length. Circuit elements in anIC, and thus links between those elements, are typically arranged in aregular geometric arrangement, such as in regular rows. In a typical rowof links, the center-to-center pitch between adjacent links is about 2-3μm. These dimensions are representative, and are declining astechnological advances allow for the fabrication of workpieces withsmaller features and the creation of laser processing systems withgreater accuracy and smaller focused laser beam spots. Although the mostprevalent link materials have been polysilicon and like compositions,memory manufacturers have more recently adopted a variety of moreelectrically conductive metallic link materials that may include, butare not limited to, aluminum, copper, gold nickel, titanium, tungsten,platinum, as well as other metals, metal alloys, metal nitrides such astitanium or tantalum nitride, metal silicides such as tungsten silicide,or other metal-like materials.

Conventional laser-based semiconductor link processing systems focus asingle pulse of laser output having a pulse width of about 4 to 30nanoseconds (ns) at each link. The laser beam is incident upon the ICwith a footprint or spot size large enough to remove one and only onelink at a time. When a laser pulse impinges a polysilicon or metal linkpositioned above a silicon substrate and between component layers of apassivation layer stack including an overlying passivation layer, whichis typically 2000-10,000 angstroms (Å) thick, and an underlyingpassivation layer, the silicon substrate absorbs a relatively smallproportional quantity of infrared (IR) radiation and the passivationlayers (silicon dioxide or silicon nitride) are relatively transparentto IR radiation. IR and visible laser wavelengths (e.g., 0.532 μm, 1.047μm, 1.064 μm, 1.321 μm, and 1.34 μm) have been employed for more than 20years to remove circuit links.

Many conventional semiconductor link processing systems employ a singlelaser pulse focused into a small spot for link removal. Banks of linksto be removed are typically arranged on the wafer in a straight row, anillustrative one of which is shown in FIG. 1. The row need not beperfectly straight, although typically it is quite straight. The linksare processed by the system in a link run 120, which is also referred toas an on-the-fly (“OTF”) run. During a link run, the laser beam ispulsed as a stage positioner passes the row of links across the locationof the focused laser spot 110. The stage typically moves along a singleaxis at a time and does not stop at each link position. Thus, the linkrun is a processing pass down a row of links in a generally lengthwisedirection (e.g., horizontally across the page as shown). Moreover, thelengthwise direction of the link run 120 need not be exactlyperpendicular to the lengthwise direction of the individual links thatconstitute the row, although that is typically true.

Impingent upon selected links in the link run 120 is a laser beam whosepropagation path is along an axis. The position at which that axisintersects the workpiece continually advances along the link run 120while pulsing the laser to selectively remove links. The laser istriggered to emit a pulse and sever a link when the wafer and opticalcomponents have a relative position such that the pulse energy impingesupon the link (e.g., trigger position 130). Some of the links are notirradiated and left as unprocessed links 140, while others areirradiated to become severed links 150.

FIG. 2 illustrates a typical link processing system that adjusts theposition of the spot 110 by moving a wafer 240 in an XY plane underneatha stationary optics table 210. The optics table 210 supports a laser220, a mirror 225, a focusing lens 230, and possibly other opticalhardware. The wafer 240 is moved underneath in the XY plane by placingit on a chuck 250 that is carried by a motion stage 260.

FIG. 3 depicts the processing of the wafer 240. A conventionalsequential link blowing process requires scanning the XY motion stage260 across the wafer 240 once for each link run. Repeatedly scanningback and forth across the wafer 240 results in complete waferprocessing. A machine typically scans back and forth processing allX-axis link runs 310 (shown with solid lines) before processing theY-axis link runs 320 (shown in dashed lines). This example is merelyillustrative. Other configurations of link runs and processingmodalities are possible. For example, it is possible to process links bymoving the wafer or optics rail. In addition, link banks and link runsmay not be processed with continuous motion.

For a wafer 240 comprising DRAM, for example, memory cells (not shown)may be located in the areas 322 between the X-axis link runs 310 and theY-axis link runs 320. For illustrative purposes, a portion of the wafer240 near an intersection of an X-axis link run 310 and a Y-axis link run320 is magnified to illustrate a plurality of links 324 arranged ingroups or link banks. Generally, the link banks are near the center of adie, near decoder circuitry, and not above any of the array of memorycells. The links 324 cover a relatively small area of the total wafer240.

For this example, the primary system parameters that impact the timespent executing link runs, and thus throughput, are the laser pulserepetition frequency (PRF) and motion stage parameters such as stageacceleration, bandwidth, settling time, and the commanded stagetrajectory. The commanded stage trajectory includes acceleration anddeceleration segments, constant velocity processing of link banks, and“gap profiling” or accelerating over large gaps between links to beprocessed in a link run.

Most improvements to system throughput over the past several years haveprimarily focused upon enhancing the stage and laser parameters.Improvements in these areas will continue. However, practicallimitations associated with these parameters make this a difficult wayto achieve large throughput gains. Stage acceleration and velocity arenot increasing as fast as laser PRF. Thus, it may be difficult to takethe most advantage of forthcoming high PRF lasers (e.g., PRFs in thehundreds of kHz or MHz ranges).

Increasing peak stage acceleration, for example, provides only a limitedthroughput improvement. Present motion stages are capable of moving awafer with a full field travel greater than 300 mm (millimeters), with 1to 2 G accelerations, while maintaining a positional accuracy on theorder of 100 nm (nanometers). Increasing stage acceleration introducesadditional vibrations and generates heat, both of which can decreasesystem accuracy. Significantly increasing the stage acceleration andbandwidth, without diminishing the positional accuracy or increasing thesystem footprint, is a challenging and costly engineering endeavor, andthe benefits of that effort would only be moderate.

Increasing the laser PRF, and hence link run velocity, is alsoundesirable for a number of reasons. First, there are unfavorablechanges in the laser pulses that result from increasing the PRF. For agiven laser cavity, as the inter-pulse period decreases, the laser pulsewidth increases. This may decrease the processing efficiency on somelink structures. Higher laser PRFs are also associated with less energystability, which also decreases processing efficiency. Higher laser PRFscan also result in lower pulse power, although that is usually not aproblem when processing links that use a small spot size.

High laser PRFs are also undesirable when applied to semiconductorproducts that have a large link pitch. The combination of high PRF andlarge link pitch requires that a very high stage velocity be used forprocessing links. A high stage velocity requires more stage accelerationand deceleration and decreases the opportunity to take advantage of gapsof unprocessed links in a run. These effects diminish some of thethroughput improvements from the higher link run velocity. A high stagevelocity also requires a tighter timing tolerance when triggering thegeneration of laser pulses in order to maintain accuracy. Processing athigh stage velocities may also not be possible if these velocitiesexceed some system specification, such as the maximum stage or positionfeedback sensor velocity.

Improvements to system throughput have been achieved using semiconductorlink processing systems that employ multiple laser pulses focused intorespective spots on a wafer surface at the same time for parallel linkprocessing. For example, two focused laser spots on one or more linksmay allow one physical pass of a wafer while processing two rows oflinks. Such systems may provide improved system throughput. However,multiple beam systems are generally larger, more complicated, and moreexpensive than single beam systems because two or more beam paths areprovided. If polarizing optics are used to split and combine laser beamsin a multiple beam system, it is also difficult to produce more than twospots at the same time due to energy losses. Further, pulses indifferent beam paths of a multiple beam system that are applied at thesame time and in the same general location may interfere with eachother, causing undesirable energy fluctuations.

Continued shrinkage of the feature sizes on semiconductor wafers willresult in an increased number of links and link runs to process thesewafers, further increasing wafer processing time. Future systemthroughput improvements of significant magnitude are unlikely to occur,however, through improvements in stage acceleration performance or laserPRF.

SUMMARY OF THE DISCLOSURE

The embodiments disclosed herein provide systems and methods forprocessing a plurality of structures, such as laser-severable links, ona semiconductor substrate. In one embodiment, a method provides a seriesof laser pulses to a first deflector configured to selectively deflectthe laser pulses within a processing window. The method also includesscanning the processing window over the semiconductor substrate suchthat a plurality of laterally spaced rows of structures simultaneouspass through the processing window as the processing window is scanned.The method also includes selectively deflecting the series of laserpulses among the laterally spaced rows within the processing window. Afirst laser pulse is deflected to a first row of the laterally spacedrows and a second laser pulse is deflected to a second row of thelaterally spaced rows. The second laser pulse is deflected to the secondrow within 100 μs after the first laser pulse is deflected to the firstrow. In one embodiment, the method also includes providing the deflectedlaser pulses from the first deflector to a second deflector. The firstdeflector is configured to deflect the laser pulses in a firstdirection, and the second deflector is configured to deflect the laserpulses in a second direction.

In one embodiment, a system for processing structures on or within asemiconductor substrate includes a laser source configured to generate aseries of laser pulses and a deflector configured to receive the seriesof laser pulses and to selectively deflect the series of pulses within aprocessing window. The system also includes a motion stage configured toscan the processing window with respect to the semiconductor substrate.A plurality of laterally spaced rows of structures simultaneously passthrough the processing window as the processing window is scanned. Thedeflector includes a switching time of approximately 100 μs or less. Thedeflector is further configured to selectively deflect the series oflaser pulses among the laterally spaced rows within the processingwindow.

In one embodiment, a laser processing system includes pulse generationmeans for generating a series of laser pulses, motion means for moving aprocessing window in a first direction with respect to a workpiece, anddeflection means for selectively deflecting the series laser pulses in asecond direction with respect to the workpiece. The deflection means isconfigured to deflect a first laser pulse to a first structure on theworkpiece within the processing window and a second laser pulse to asecond structure on the workpiece within the processing window. Thedeflection means is also configured to deflect the second laser pulse tothe second structure within 100 μs after deflecting the first laserpulse to the first structure.

Additional aspects and advantages will be apparent from the followingdetailed description of preferred embodiments, which proceeds withreference to the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram illustrating a prior art row or bank oflinks being selectively irradiated with a laser spot scanning along alengthwise direction of the bank.

FIG. 2 is a schematic diagram of a prior art link processing system.

FIG. 3 is a schematic diagram of a prior art semiconductor waferincluding a plurality of link runs.

FIG. 4 is a schematic diagram illustrating a link run velocity profilecorresponding to the processing of a link run according to oneembodiment.

FIGS. 5A-5F are schematic diagrams illustrating several ways in which alaser processing system may deliver a serialized sequence of pulses toprocess two or more laterally spaced link banks according to certainembodiments.

FIG. 6 is a schematic diagram of a laser processing system comprising anacousto-optic deflector (AOD) according to one embodiment.

FIGS. 7A and 7B are schematic diagrams of an AOD according to certainembodiments.

FIGS. 8A and 8B are schematic diagrams of a laser beam impinging upon asurface of an AOD according to certain embodiments.

FIG. 9 is a flowchart of a process for using an optimized deflector toprocess laser-severable links arranged in a plurality of link banks on asemiconductor substrate according to one embodiment.

FIG. 10 is a schematic diagram illustrating a processing window scanningacross a plurality of laterally spaced link banks according to oneembodiment.

FIG. 11 is a schematic diagram illustrating a processing window scanningacross a plurality of laterally spaced link banks extending along anX-axis and a plurality of link banks extending along a Y-axis accordingto one embodiment.

FIGS. 12A-12C are timing diagrams illustrating a series of laser pulsesin relation to respective repositioning profiles according to certainembodiments.

FIG. 13 is a schematic diagram of a laser processing system comprisingtwo deflection devices according to one embodiment.

FIG. 14 is a schematic diagram of a laser processing system including atelecentric angle detector according to one embodiment.

FIG. 15 is a schematic diagram of dual-beam path laser processing systemaccording to one embodiment.

FIG. 16 is a schematic diagram of a dual-path laser processing systemaccording to another embodiment.

FIG. 17 is a schematic diagram of a fiber optic laser processing systemaccording to one embodiment.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

With reference to the above-listed drawings, this section describesparticular embodiments and their detailed construction and operation.The principles, methods, and systems disclosed below have generalapplicability for processing any structure on or within a semiconductorsubstrate using laser radiation for any purpose. While the examples andembodiments that follow are described in the context in which thosestructures are laser-severable links on or within an IC (e.g., memorydevice, logic device, optical or optoelectronic device including LEDs,and microwave or RF devices), other structures besides laser-severablelinks can be processed in the same or similar manner. Thus, theteachings set forth herein are equally applicable to the laserprocessing of other types of structures, such as electrical structuresthat become conductive as a result of laser radiation, other electricalstructures, optical or electro-optical structures, and mechanical orelectro-mechanical structures (e.g., MEMS (micro electromechanicalstructures) or MOEMS (micro opto-electro-mechanical structures)).

The purpose of the irradiation may be to sever, cleave, make, heat,alter, diffuse, anneal, or measure a structure or its material. Forexample, laser radiation can induce a state change in a structure'smaterial, cause the migration of dopants, or alter magneticproperties—any of which could be used to connect, disconnect, tune,modify, or repair electrical circuitry or other structures.

As one skilled in the art will appreciate in light of this disclosure,certain embodiments are capable of achieving certain advantages over theknown prior art, including some or all of the following: (1) increasingthroughput, possibly by multiplicative factors, e.g., by a factor of 2,3, or more; (2) decreasing floor space required for link processingequipment in a fabrication facility; (3) decreasing the time elapsingbetween scanning alignment targets and completing link processing,thereby (a) allowing less time for thermal drift of the components andstructure of the semiconductor processing system, resulting in enhancedsystem accuracy, (b) enabling larger wafer processing fields, whichresults in longer link runs and an additional throughput improvement,and (c) permitting less frequent rescanning of alignment targets whenthermal shifts are detected or when the time elapsed since theirprevious scan becomes too large, thus further enhancing throughput byreducing the number of operations necessary for accurate linkprocessing; and (4) allowing beneficial relaxation of some presentsystem parameters, such as XY stage acceleration and laser pulserepetition frequency, while still processing wafers at a rate that isequivalent to or faster than present link processing systems.

As an example of the latter advantage, lowering the stage accelerationrequirements can reduce the thermal energy released into the systemenvironment, reducing thermal shifts that occur during wafer processing.Lower acceleration also improves accuracy by reducing the excitation ofsystem resonances and vibrations, resulting in smoother, gentler, morestable system operation. Motion stages can also be selected with a lowercost, preferential mechanical configuration, greater simplicity, and noneed for auxiliary cooling systems if a reduced acceleration isacceptable.

As another example, a laser source with a lower PRF could be used forprocessing. Lower PRF lasers may have improved pulse properties such asfaster rise time, enhanced pulse stability, increased peak pulse power,and shorter pulse width. Lower PRF lasers may also be less costly andmay be operable with smaller power supplies that generate less heat.These and other advantages of various embodiments will be apparent uponreading this disclosure.

As used herein: the term “on” means not just directly on but atop,above, over, or covering, in any way, partially or fully. Also the term“substantially” is a broadening term that means about or approximatelybut does not imply a high degree of closeness.

Reference is now made to the figures in which like reference numeralsrefer to like elements. For clarity, the first digit of a referencenumeral indicates the figure number in which the corresponding elementis first used. In the following description, numerous specific detailsare provided for a thorough understanding of the embodiments disclosedherein. However, those skilled in the art will recognize that theembodiments can be practiced without one or more of the specificdetails, or with other methods, components, or materials. Further, insome cases, well-known structures, materials, or operations are notshown or described in detail in order to avoid obscuring aspects of theembodiments. Furthermore, the described features, structures, orcharacteristics may be combined in any suitable manner in one or moreembodiments.

I. Analysis of Link Run Processing Time

Generally, the current true utilization of laser pulses in a linkprocessing system is quite low. For example, a typical wafer includingapproximately 600,000 links may be processed in approximately 600seconds. This represents an effective blow rate of 1 kHz. If thisexample wafer processing system uses a laser source with a 70 kHz pulserepetition frequency (PRF), only about one out of every seventy possiblelaser pulses reaches the surface of the wafer.

Measurements from the repair of typical DRAM wafers show that the timeto execute link runs accounts for the majority of wafer processing time.Approximately 80% of total processing time may be spent executing linkruns, and the remaining 20% is spent performing overhead tasks, such asmoving the wafer to shift the cutting laser from the end of one link runto the start of the next link run, alignment, focusing, andcomputational overhead. Because the dominant component of linkprocessing time is typically spent executing link runs, significantreductions in wafer processing time can result from reducing the timespent executing link runs.

FIG. 4 illustrates a link run velocity profile 410 corresponding to theprocessing of a link run 420 according to one embodiment. As usedherein, the term “velocity profile” means velocity as a function of timeor distance over a span of time or an interval of distance. Link runexecution includes of a number of different operations. While processinga bank 430 of links with a tight pitch spacing (e.g., thecenter-to-center distance between adjacent links in the same bank), thelaser beam axis advances relative to the wafer at a nearly constantvelocity 440. Note that, although FIG. 4 shows an example in which theconstant velocity 440 is the same for each link bank 430 in the link run420, it is possible that different link banks 430 may have differentconstant velocities, such as when the pitch spacing differs from bank tobank in the same link run.

When there is a large gap 450 between subsequent links in a link run,the system accelerates to span the gap 450 in less time and thendecelerates near the end of the gap to reach a nominal velocity onceagain. The acceleration and deceleration results in a gap profile 460 inthe link velocity profile 410. At the beginning of a link run, thesystem undergoes an initial acceleration 470 from a resting positionfollowed by a period of settling 480. At the end of a link run, thesystem undergoes a deceleration 490 back down to zero velocity. Thus,the typical operations that the system performs during execution of alink run include ramping up the stage to constant velocity, settling,processing links at constant velocity, accelerating (gap profiling) overany large gaps, and ramping back down to zero velocity at the end of therun. FIG. 4 illustrates the effect of these operations on link runon-axis velocity (in the link run scan direction). Note that while thelink run 420 is depicted as a straight line through collinear linkbanks, it is possible for the banks of links to not be in line. The linkrun 420 would then include lateral position commands as well.

A gap profiling operation involves accelerating, decelerating, andsettling to travel between two links in less time than would be requiredat constant velocity. The increased throughput provided by gap profilingis dependent upon the quantity and spacing of large gaps between links,the acceleration capabilities of the stage, the settle time, and thelink run velocity. A greater time savings results on products that havemany large gaps in link runs and a small link pitch.

Generally, the time spent accelerating and decelerating at the start andend of link runs is approximately 1.5% of the time spent on link runs.The time saved with gap profiling is approximately 50% of the time thatwould be required to traverse the link runs at constant velocity. Thesenumbers vary widely for different types of wafers. Workpieces with fewor no large gaps between links may not receive any benefit from gapprofiling. On the other hand, products with sparse or random link layoutmay receive greater benefit from gap profiling.

II. Processing Multiple Link Banks with a Deflected Laser Beam

In one embodiment, multiple link banks within a processing window areprocessed with a deflected laser beam. As laser PRFs increase fasterthan XY stage performance, the accelerations and velocities to keep upwith the high PRF lasers are not available. Thus, a laser beam accordingto one embodiment is temporally decimated into a plurality of effectivebeams. The plurality of effective beams may share the same optics in abeam path. In another embodiment, the plurality of effective beamsincludes beam paths that have physically separate optics for each beam.

A beam deflector is configured to perform the temporal decimation. Thebeam deflector may include, for example, an acousto-optic deflector(AOD), an electro-optic deflector (EOD), a fast steering mirror (FSM), adeformable mirror, a rotating polygon, an actuated mirror, a tilt plate,or any other beam steering technology known in the art. An exampleoptimized AOD embodiment is described in greater detail below. However,an artisan will recognize from the disclosure herein that other highspeed beam steering devices may be used in other embodiments. Forexample, in one embodiment, a high speed, electro-optical beam scanneris used such as a KTN (KTaI-xNbxO3, Potassium Tantalate Niobate) crystalavailable from Nippon Telegraph and Telephone Corp. of Tokyo, Japan.

In one embodiment, the workpiece may be moved in addition to or insteadof the laser beam to impart relative motion between a focused spot andthe workpiece. Such an embodiment may also be considered herein as abeam “deflector.”

Deflecting a laser beam among multiple link banks may take manydifferent forms, with laser pulses being delivered to links with adifferent lateral (cross-axis) spacing, different on-axis spacing,different on-axis and cross-axis spacing, or no difference in linkspacing. For example, FIGS. 5A-5F are schematic diagrams illustratingseveral ways in which a laser processing system according to certainembodiments may deliver a serialized sequence of pulses that effectivelyprocess two or more laterally spaced link banks.

In FIG. 5A, a sequence of laser spots (A, B, C, D, E, F) is delivered toa plurality of links 324 in a first link bank 510 and a second link bank512 using a deflected laser beam. In this example, the link banks 510,512 are laterally spaced, substantially parallel, and offset (e.g., thelinks 324 in the first link bank 510 are not directly aligned with thelinks 324 in the second link bank 512). In FIG. 5B, the link banks 510,512 are not offset. As shown, the laser spots according to oneembodiment may be deflected in a horizontal direction, a verticaldirection, or a combination of horizontal and vertical directions toimpinge upon the links 324 in both link banks 510, 512. In theembodiments shown in FIGS. 5A and 5B, the focused spots A, B, C, Dsequentially advance horizontally across the link runs 510, 512 as theyalternate in the cross-axis (lateral) direction between the first linkrun 510 and the second link run 512.

Although we say that the spots A, B, C, D advance along their respectivelink banks 510, 512, that is a linguistic shorthand. More precisely, aspot results from a laser beam when the laser beam is on. In the case ofan intermittent laser beam, such as a pulsed laser beam, the resultingspot on the IC workpiece comes and goes as the laser beam turns on andoff. However, the laser beam propagates along an axis of propagation,and that axis always exists whether the beam is on or not. Thus, to beprecise, a laser beam axis may move along a link run. At any given timeduring the link run, the axis intersects the IC workpiece either on alink or between two adjacent links. When a laser beam axis intersects alink that has been selected for removal, the laser beam is energized tosever the link. When the laser axis is moving along a bank of regularspaced links (with an approximately uniform pitch), the laser beam canbe pulsed periodically at a rate equivalent to and synchronized in phasewith the axis's crossing of links. The laser pulses can be selectivelypassed or blocked to sever a given link or leave it intact.

While the spots (e.g., A, B, C . . . ) are illustrated as having acircular shape in FIGS. 5A-5E (and in other drawings), they may have anyarbitrary shape.

As already mentioned, an advantage of laterally deflecting the spots A,B, C, D between a plurality of link banks 510, 512 is that waferprocessing can be accomplished with fewer link runs, resulting in muchgreater throughput without any laser or motion stage enhancements.However, an artisan will recognize from the disclosure herein that adeflector may selectively distribute laser pulses among a plurality oflink banks in a variety of different patterns. For example, as shown inFIGS. 5A and 5B, two successive laser spots E, F may be applied to thesame link in either a substantially same location (FIG. 5A) or atslightly offset locations (FIG. 5B). In one embodiment, the beamdeflector adjusts to provide the successive laser spots E, F to the samelink during a link run with continuous relative motion between theworkpiece and the XY motion stage of the laser processing system.

In FIG. 5C, a sequence of laser spots (A, B, C, D, E, F, G) is deliveredto a plurality of links 324 in a first link bank 510, a second link bank512, and a third link bank 514 using a deflected laser beam. Dependingon the range of the particular deflector used to direct the laser beam,more than three link banks 510, 512, 514 may also be processed at thesame time. Further, while FIG. 5C illustrates the laser spots beingsequentially applied to the first link bank 510 (e.g., laser spot A),then to the second link bank 512 (e.g., laser spot B), followed by thethird link bank (e.g., laser spot C), in a repeating pattern, an artisanwill recognize that this disclosure is not so limited. Indeed, in oneembodiment, the spots may be sequentially applied to any of the links324 in any of the link banks 510, 512, 514 in any order.

Further, an artisan will recognize from the disclosure herein that anypattern of links or link banks may be processed by the deflectedsequence of laser spots. For example, FIG. 5D illustrates a plurality oflinks 324 arranged in both lateral and offset configurations. Althoughnot shown, many different on-axis spaced link bank configurations and/orcombinations of cross-axis and on-axis configurations may be processedaccording to the systems and methods disclosed herein. In oneembodiment, different processing modes may be used between applyinglaser spots to two subsequent links. Thus, any configuration of linksmay be processed in any sequence within a processing windowcorresponding to the deflector's range of deflection angles.

An artisan will understand from the disclosure herein that the patternand order of link blows in FIGS. 5A-5D is merely illustrative. Anydesired sequence of pulses within a processing window may be processed,or not processed, in any order. For example, in FIG. 5D, it is possibleto process in a different order such as (D, F, N, O, K, A, C, E, L)where processing occurs with sequential, or non-sequential pulses out ofthe laser. As another example, FIG. 5E illustrates a plurality of links324 arranged in a pattern as shown in FIG. 5D. However, in FIG. 5E arandom sequence of laser spots (A, B, C, D, E, F, G, H) is delivered toselected links in the plurality of links 324. Further, an artisan willrecognize that it is not necessary to direct a laser pulse down a beampath towards, and block the laser pulse from hitting, a link that doesnot require processing. Rather, it may be more efficient to direct thelaser pulse down a beam path requiring processing so as to minimize thenumber of blocked pulses. An artisan will also understand from thedisclosure herein that a row of links may only include a single link.For example, in FIG. 5F the links 324 are randomly organized such thatno two links are in the same row (e.g., in the on-axis direction).

III. AOD Optimization

As discussed above, in one embodiment an AOD may be used to deflect aseries of laser pulses among a plurality of link banks. For example,FIG. 6 is a schematic diagram of a laser processing system 600comprising an AOD 610 according to one embodiment. As discussed indetail below, in this example embodiment the AOD 610 comprises a veryhigh speed device configured to deflect a pulsed laser beam 612 emittedby a laser 614 such that two sequential pulses may be delivered to twodifferent links in two laterally spaced link banks. In one embodiment,the AOD 610 is configured to deflect laser pulses in one dimension(e.g., perpendicular to a scanning direction). In another embodiment,the AOD 610 is configured to deflect laser pulses in two dimensions(e.g., perpendicular to a scanning direction and parallel to thescanning direction). In other embodiments, two AODs (e.g., see AODs 610and 1312 in FIGS. 13 and 14) are used to provide deflection in a twodimensions.

In one embodiment, the laser processing system 600 also includes aswitch 616 configured to allow or block laser pulses from reaching aworkpiece 618 (e.g., a semiconductor wafer including a plurality oflinks 620). The switch 616 may include an AOD or acousto-optic modulator(AOM) device. In one embodiment, however, the switch 616 and the AOD 610comprise a single device configured to selectively direct the pulsedlaser beam 612 to a beam dump (not shown) to block laser pulses fromreaching the workpiece 618.

As also shown in FIG. 6, the laser processing system 600 may alsoinclude a relay lens 622 to direct differently deflected beam paths(illustrated exiting the AOD 610 as a solid line and a dashed line) to asame location on a mirror 624 (or other redirection device such as anFSM) corresponding to an entrance pupil of a focus lens 626. Inoperation, different deflection angles provided by the AOD 610 result indifferent pulses being directed to different locations (e.g., links 620)on the workpiece 618. Although not shown, in one embodiment, acontroller configured to execute instructions stored on a computerreadable medium controls the AOD 610 so as to selectively deflect asequence of laser pulses to desired locations on the workpiece 618.

An artisan will recognize from the disclosure herein that the system 600is provided by way of example and that other system configurations arepossible. Indeed, various other example system embodiments are providedbelow.

In some embodiments, various parameters of the AOD 610 are optimized toprovide desired AOD performance. The AOD 610 may be optimized toachieve, for example, a desired switching speed, a desired range andresolution of deflection angles, and/or a desired optical transmissionefficiency. In one embodiment, for example, AOD parameters are optimizedto achieve a switching time of less than approximately 100 μseconds suchthat the AOD 610 switches faster than an example 10 kHz laser. Inanother embodiment, for example, the AOD parameters are optimized toachieve a switching time of less than approximately 10 μseconds suchthat the AOD 610 switches faster than an example 100 kHz laser.

In certain embodiments, the AOD 610 is optimized with a deflection angleof approximately +/−4 mradians so as to provide a processing windowapproximately +/−25 μm wide at the workpiece 618 with the focus lens 626having a focal length of approximately 6.25 mm. Assuming, for example, a0.5 μm spot size, this requires 100 resolvable spots. Thus, the AOD 610may be further optimized to achieve such a resolution. The AOD 610 isalso optimized, according to one embodiment, to achieve a deflectionangle with a precision of less than approximately 0.8 μradians forprecise targeting. In addition, or in another embodiment, the AOD 610 isfurther optimized to achieve an optical transmission efficiency ofgreater than approximately 50% to reduce loss of laser pulse energy.

The following discussion provides specific examples for achieving suchAOD optimization. However, an artisan will recognize from the disclosureherein that the following examples are not exclusive and that the AOD610 may be optimized in any manner known in the art to achieve thedesired switching speed, range and resolution of deflection angles,and/or optical transmission efficiency discussed above.

It is well known that in the Bragg regime of operating an acousto-opticdevice, the normalized intensity produced in a first-order diffractedbeam is given to a good approximation by

$\begin{matrix}{{I = {\left( {\sin^{2}\sqrt{\eta}} \right) \cdot \frac{{\sin^{2}\left( {\Delta \; k_{1}{L/2}} \right)}\;}{\left( {\Delta \; k_{1}{L/2}} \right)^{2}}}},} & (1) \\{where} & \; \\{\eta = {\frac{\pi^{2}}{2\lambda^{2}}M_{2}\frac{P_{a}L}{H}}} & (2)\end{matrix}$

is the acousto-optic interaction efficiency for a Bragg cell.

In equations (1) and (2) above, L (see FIGS. 7A and 7B) is an acousticfield length (along the optical wave propagation direction), H (seeFIGS. 7A and 7B) is an acoustic field height (transverse to the opticaland acoustic wave propagation directions), Δk₁ is a Bragg angle(momentum) mismatch, λ is an optical wavelength in an acousto-opticmedium, P_(a) is an acoustic power, and M₂ is an acousto-optic figure ofmerit of the Bragg cell material.

For good efficiency (large η), desirable parameters include a longacoustic interaction length L, a small acoustic field height H, and aBragg cell material with a large figure of merit M₂. In one embodiment,one or more of these parameters are adjusted to maintain the efficiencyη above a threshold value.

When operating the acousto-optic device as a deflector, the direction ofthe diffracted beam is varied by changing a drive frequency f of anacoustic wave within the AOD 610. It can be shown that the resolution(number of resolvable angular positions) N of the AOD 610 is given by

N=τΔf,   (3)

where τ is an acoustic transit time across the optical beam and ≢f is afrequency range over which the AOD 610 is operated. Thus, τ is a measureof the speed (access time) of the AOD 610. Once a desired speed of theAOD 610 is specified, the only parameter available to maximizeresolution N is the deflector bandwidth Δf.

By way of illustration, FIGS. 7A and 7B are schematic diagrams of an AOD610 according to certain embodiments. The AOD 610 includes a length Land a height H. As shown in FIG. 7A, the AOD may include a transducer710 configured to convert a radio frequency (RF) signal from an RF powerdriver into an acoustic wave 714 that sets up within the AOD 610. As theacoustic wave 714 transverses through the AOD 610, the acoustic wave 714distorts an optical media 716 within the AOD 610, causing increases anddecreases in indexes of refraction in the AOD 610. Thus, an incominglaser beam 718 is diffracted by the acoustic wave 714 and follows thelaws of diffraction, resulting in a zero-order beam 720 that is on-axisand in one or more first-order (or higher-order) beams 722 at anglesspecified by equations relating to the diffraction process.

For the AOD 610 shown in FIG. 7A with a single transducer 710 of lengthL, the Bragg angle mismatch term Δk₁ determines the deflector bandwidthΔf. Generally, the AOD 610 operates at a center frequency f_(o) at whichthe Bragg condition is satisfied (Δk₁=0). As the AOD 610 operates atfrequencies further from the center frequency f_(o), the Bragg anglemismatch Δk₁ increases. Because it is the product (Δk₁)(L) thatdetermines the phase matching behavior (see, e.g., the second term onthe right hand side of equation (1)), a single transducer device thathas a shorter length L also has a larger scan bandwidth Δf.

It can be shown that

$\begin{matrix}{{\frac{\Delta \; f}{f_{0}} \approx {1.8\frac{L_{0}}{L}}},} & (4) \\{where} & \; \\{L_{0} \equiv \frac{n\; \Omega_{o}^{2}}{\lambda}} & (5)\end{matrix}$

is a characteristic length at the AOD 610. In equation (5), n is arefractive index of the Bragg cell and Ω_(o) is an acoustic wavelengthat the center frequency f_(o). Thus, to increase the AOD's bandwidth Δf,the AOD 610 is configured with a shorter acoustic field length L.However, using a shorter acoustic field length L is in conflict with theneed or desire for good efficiency η.

The competing demands for good efficiency (large L) and high bandwidth(small L) can be addressed by replacing the single transducer 710 shownin FIG. 7A of length L with a linear array 724 of shorter transducers726. In the example embodiment shown in FIG. 7B, the linear array 724has an effective total length L.

In one embodiment, the relative phases of the transducers 726 in thelinear array 724 are configured as a function of deflector frequency fto steer the acoustic beam 714 so that it minimizes the Bragg anglemismatch Δk₁ over the deflector bandwidth Δf. As shown in FIG. 7B, inone such embodiment, the AOD 610 includes a plurality of fixed delaycircuits 728 (three shown) to introduce a time delay between adjacenttransducers 726 such that at the center frequency f_(o) the transducers726 are all driven in phase. At frequencies f that are not equal to thecenter frequency f_(o) (f≠f_(o)), the phase shifts across the array 724result in a net steering of the acoustic propagation direction thatlessens the Bragg angle mismatch Δk₁ that would otherwise result from asingle transducer (e.g., the transducer 710 shown in FIG. 7A) of thesame effective length L. Thus, in one embodiment, the relative phases ofthe linear array are based on the selected deflector frequency f. Anartisan will recognize from the disclosure herein that the relativephases of the transducers 726 in the array 724 may be selectivelycontrolled (e.g., using variable delay between transducers 726 ratherthan a fixed delay). Further, in another embodiment, the transducer 710shown in FIG. 7A may comprise a stepped transducer that is geometricallyconfigured to alter the phase across its length L as a function of thedeflector frequency f to steer the acoustic beam so as to reduce theBragg angle mismatch Δk₁ over the deflector bandwidth Δf.

Because the dielectric constant of an acoustic transducer material suchas LiNbO₃ is very high, the impedance presented by the transducer 710(or transducers 726) at frequencies greater than 100 MHz is small (e.g.,on order of a few Ohms). The impedance Z follows the scaling relation

$\begin{matrix}{Z \sim {\frac{1}{{HLf}_{o}^{2}}.}} & (6)\end{matrix}$

The relation shown in equation (6) drives a need or desire for a smalltransducer area (HL) in order to raise the transducer impedance andfacilitate the design of an impedance matching network between the driveelectronics and the transducer 710 (or transducers 726). Using thephased array 724 reduces the transducer area (HL) because the individualtransducers 726 making up the array 724 are smaller than a singlemonolithic transducer (such as the transducer 710). In addition, or inother embodiments, each of the transducers 726 in the array 724 may befurther segmented into multiple series-connected transducers (notshown). Such segmentation further reduces the transducer area (HL).

In addition, or in another embodiment, the performance of the AOD 610 isimproved by providing it with an anamorphic (non-circular) shapedoptical beam. The transducer height H appears in the denominator forboth the transducer impedance Z and the device efficiency η. Thus, it isdesirable that this dimension of the transducer 710 (or transducers 726)be reduced as much as is practical. However, to avoid cutting offportions of the laser beam 718, the AOD's height H should be more thanthe height of the laser beam 718. This sets a practical limit on howsmall H can be before the divergence of the optical beam becomesexcessive.

For example, FIGS. 8A and 8B are schematic diagrams of a laser beam 718impinging upon a surface 810 of an AOD 610 that includes a reducedheight H, as compared to FIGS. 7A and 7B. The surface 810 is defined bya width W and the height H. As shown in FIG. 8A, a substantiallycircular shaped laser beam may, in some embodiments, be larger than thesurface 810. Thus, in the embodiment shown in FIG. 8B, the laser beam718 comprises an anamorphic shape that is longer in the direction of thewidth W and shorter in the direction of the height H so as to fit withinan area defined by the surface 810.

Further, the resolution N of the AOD 610 is proportional to the transittime τ of the acoustic wave 714 across the beam 718 in the dimensionnormal to the beam height H (see equation (3)). Thus, the anamorphicshaped beam 718 shown in FIG. 8B maintains a longer dimension in thedirection of the width W. Accordingly, using the anamorphic shapedoptical beam 718 within the AOD simultaneously achieves a highresolution N, a good efficiency η, and a higher transducer impedance.

In one embodiment, the RF drive power (e.g., the power level of the RFsignal provided by the RF power driver 712) is kept at a constant levelwithin requirements imposed by the thermal characteristics of the AOD610. Thus, the RF power driver 712 and the AOD 610 are configured tomaintain spot image quality and accuracy.

In addition, or in other embodiments, the system 600 calibrates outvariations in diffraction efficiency and spot placement over the scanfield. Nonlinear effects may cause variation in diffraction efficiencyand focused spot location as a function of the frequency or amplitude ofthe RF power applied to the AOD 610. In one embodiment, the diffractionefficiency and/or spot placement may be characterized as a function ofRF power and frequency. A look-up table or mathematical formula may becreated, based on this characterization, to vary the RF power andfrequency applied to the AOD 610 to achieve a desired spot placement andpulse energy. It is also possible to compensate for variations indiffraction efficiency by using an additional configurable attenuatorsuch as an acousto-optic modulator (AOM).

FIG. 9 is a flowchart of a process 900 for using an optimized deflectorto process laser-severable links arranged in a plurality of link bankson a semiconductor substrate according to one embodiment. The process900 includes providing 910 a series of laser pulses to an AOD. In oneembodiment, the process 900 also includes anamorphically shaping 912 theseries of pulses provided to the AOD. Thus, as discussed above, theheight of the AOD may be reduced to improve resolution, efficiency andtransducer impedance.

The process 900 further includes varying 914 a frequency of the acousticwave to selectively deflect the series of laser pulses within a range ofdeflection angles. The process 900 further includes steering 916 theacoustic wave within the AOD to reduce a Bragg angle mismatch betweenthe acoustic wave and the series of laser pulses over the range ofdeflection angles. For example, in one embodiment, the AOD includes aphased array of transducers where the respective phases are selected toreduce the Bragg angle mismatch as the frequency of the acoustic wave isvaried. In another embodiment, for example, the AOD includes a steppedtransducer geometrically configured to steer the acoustic wave as afunction of the frequency so as to reduce the Bragg angle mismatch.

The process 900 further includes using the AOD to deflect a first laserpulse to a first link in a first link bank and a second laser pulse to asecond link a second link bank. In one embodiment, the second laserpulse immediately follows the first laser pulse in the series of laserpulses.

Thus, the process 900 allows multiple link runs to be processed at thesame time in a single pass of the semiconductor substrate. Further,processing multiple link banks in a single pass allows a higher numberof generated laser pulses to be used from a high PRF laser with a slowmotion stage, thereby increasing throughput. Also, as compared tomultiple beam path systems that simultaneously provide two or more beamspots on a work surface, the process 900 serially provides a single beamspot on the work surface at any one time, thereby reducing oreliminating coherent crosstalk between beams directed to overlap at thework surface. The process 900 also allows for a simplified optics layoutas compared to a multiple beam path system.

IV. Swath Processing

Because links, link banks, and link runs are typically constrained tonarrow strips that cover a small percentage of a wafer area (see FIG.3), multiple laterally spaced links within a scan field of a focus lensmay be efficiently processed as the scan field traverses across thewafer.

As discussed in detail below, different system configurations may beused to process multiple laterally spaced links as a scan fieldtraverses across a wafer. For purposes of discussion, we refer again tothe system 600 shown in FIG. 6. In one embodiment, the system 600processes multiple link runs simultaneously in a “swath” or “strip”using a high speed beam deflecting device 610.

The system 600 may include a large processing window within the scanfield of the focus lens 626. For example, in one embodiment, theprocessing window is approximately 50 μm wide by approximately 50 μmlong (50 μm×50 μm). Of course, the disclosure herein is not limited tothis size. For example, in other embodiments, the size of the processingwindow is in a range between approximately 50 μm×50 μm and approximately150 μm×150 μm. In another embodiment, the size of the processing windowis approximately 500 μm×500 μm. Further, the processing window need notbe square. For example, round or rectangular processing windows may alsobe used.

A factor that may be considered in selecting the size of the processingwindow may be the cost of lenses with relatively larger scan fields. Forexample, a lens with a useful scanning field of approximately 50 μm maycost approximately $20,000, while a lens with a useful scanning field ofapproximately 500 μm may cost approximately $500,000. Thus, an analysisof increased throughput versus lens cost may identify an optimal sizefor a processing window.

As the processing window is continuously advanced or stepped across theworkpiece 618, the high speed deflecting device 610 is used toefficiently deliver laser pulses to links in the various link runs thatpass through the processing window. To efficiently process links in alarge processing window scanning across the workpiece 618 at a desiredvelocity, it may be necessary in certain embodiments to use a very highspeed technology for redirecting the pulsed laser beam 612 from oneprocessing spot on the workpiece 618 to another processing spot on theworkpiece 618.

In one embodiment, the speed of the high speed deflecting device 610 isapproximately on the time scale of the laser pulse period. For example,when using a laser 614 with a 100 kHz PRF, the high speed deflectingdevice 610 has a switching time on the order of approximately 10μseconds. Many mechanical actuators, such as piezoelectrically actuatedmirrors or galvanometers, may have insufficient bandwidth and/orresponse time to operate as an effective steering mechanism. Thus, incertain embodiments, the system 600 uses AOD and/or EOD type beamsteering devices to redirect the beam 612 to different locations on theworkpiece 618 within the processing field on this time scale. In oneembodiment, the high speed deflecting device 610 comprises the optimizedAOD 610 discussed above in relation to FIGS. 7A and 7B.

FIG. 10 is a schematic diagram illustrating a processing window 1000scanning across a plurality of laterally spaced link banks 1010, 1012,1014, 1016, 1018, 1020 according to one embodiment. Each link bank 1010,1012, 1014, 1016, 1018, 1020 includes a plurality of links 1022 that arenot severed and a plurality of links 1024 that are severed by a seriesof laser pulses as the processing window 1000 scans across the pluralityof link banks 1010, 1012, 1014, 1016, 1018, 1020.

In one embodiment, a laser processing system 600 is configured to severany link 1022, 1024 within the moving processing window 1000. Thus,rather than using six individual link runs to process the six link banks1010, 1012, 1014, 1016, 1018, 1020 included in the example shown in FIG.10, the system 600 processes all six link banks 1010, 1012, 1014, 1016,1018, 1020 in a single pass, greatly improving system throughput. In oneembodiment, for example, a system including a 100 kHz laser providedthrough a single beam path, a 50 μm×50 μm processing window, and a lowperformance stage (e.g., 1 G accelerations per axis and 20 ms settletimes), may have an increased throughput that is two to three times thatof conventional link processing systems. Such a system would becompetitive with a dual-beam system including a high PRF laser (e.g.,300 kHz) and a high performance stage (e.g., 1 m/second link runs, 5 Gaccelerations, and 0.001 second settle times). It may be significantlyeasier and cheaper to build the system having the lower performancestage. Further, the single beam system may be easier and cheaper tobuild than the dual-beam system.

In one embodiment, the processing window 1000 scans across the pluralityof link banks 1010, 1012, 1014, 1016, 1018, 1020 in a substantiallycontinuous motion as the plurality of links 1024 are severed. In anotherembodiment, the processing window 1000 steps across the plurality oflink banks 1010, 1012, 1014, 1016, 1018, 1020 in a series of discretemovements. In one such embodiment, the processing window comprises twomutually exclusive sets of links 1022, 1024 between each step or hop.Thus, the system 600 may process a first set of links 1022, 1024 in bothon-axis and cross-axis directions within the processing window 1000 at afirst location before the processing window 1000 moves to a secondlocation that includes a second (and different) set of links. In anotherembodiment, the processing window 1000 takes smaller steps in the scandirection such that when one group (e.g., one column) of links 1022,1024 corresponding to respective link banks 1010, 1012, 1014, 1016,1018, 1020 enters the scanning window 1000 during a step, another groupof links 1022, 1024 exits the scanning window 1000. Thus, the system 600processes a group or column of laterally spaced links 1022, 1024 indifferent link banks 1010, 1012, 1014, 1016, 1018, 1020 between eachstep.

An artisan will understand from the disclosure herein that, depending onthe relative sizes of the processing window 1000 and the link banks1010, 1012, 1014, 1016, 1018, 1020, the system 600 may process more thansix link banks in a single pass. Further, the system 600 may processless than six link banks in a single pass, including, for example,processing a single link bank in a single pass.

An artisan will also understand from the disclosure herein that thesystem 600 is not limited to processing substantially parallel,laterally spaced link banks 1010, 1012, 1014, 1016, 1018, 1020 withinthe processing window 1000. Indeed, the links 1022, 1024 passing throughthe processing window 1000 may be arranged in any pattern. The severedlinks 1024 may also be severed in any sequence. Further, while FIG. 10shows a uniform scan direction in the X-direction (horizontal), the scandirection may also be in the Y-direction (vertical), a combination of Xand Y directions, and/or a random pattern around the XY plane of awafer. In one embodiment, the scan direction is selected so as tooptimize throughput.

For example, FIG. 11 is a schematic diagram illustrating a processingwindow 1000 scanning across a plurality of laterally spaced link banks1010, 1012, 1014, 1016, 1018, 1020 extending along an X-axis and aplurality of link banks 1110, 1112 extending along a Y-axis according toone embodiment. In a single pass of the processing window 1000 over thelaterally spaced link banks 1010, 1012, 1014, 1016, 1018, 1020 extendingalong the X-axis, the processing window 1000 also passes over at least aportion of the links 1022, 1024 in the plurality of link banks 1110,1112 extending along the Y-axis. Again, as shown in FIG. 11, the system600 may selectively sever any of the links 1022, 1024 passing throughthe processing window 1000.

In one embodiment, the system 600 sorts and orders the sequence of linkblows within the processing window 1000 so as to maximize or increasethroughput. To achieve this maximized or increased throughput, thesystem 600 also calculates a stage velocity that is compatible with thesize of the processing window 1000, the number of links 1022, 1024within the processing window 1000 to be blown at any given time, and thesequence of link blows. In one such embodiment, the system 600 selects astage velocity so as to reduce the number of blocked pulses. The stagevelocity may also be selected to ensure that every link intended to beblown is blown in a single pass of the processing window 1000. In oneembodiment, the stage velocity may be constant.

In other embodiments, the stage velocity may vary based on the number oflinks 1024 to be blown currently passing through the processing window1000. For example, when fewer links 1024 to be blown are passing throughthe processing window 1000, the system 600 may increase the stagevelocity. When more links 1022, 1024 to be blown are passing through theprocessing window 1000, the system 600 may decrease the stage velocity.

In one embodiment, a maximum stage velocity V_(SMAX) is determined byfinding the maximum number of links (N_(MAX)) within the processingwindow 1000 over a group of link runs. For example, the maximum stagevelocity V_(SMAX) may be set to the width (AOD_(width)) of theprocessing window 1000 multiplied by the PRF divided by N_(MAX). Thisprovides a good estimate for the maximum stage velocity V_(SMAX).However, in one embodiment, the system 600 takes into account possible“queueing” of the links 1022, 1024 in the processing window 1000, whichprovides a buffer for unprocessed links over short sections of the linkruns when the velocity exceeds the above limit. Depending on the densityof the link runs, such queueing may increase the stage velocity in arange between approximately 50% and approximately 100%. This improvementmay be diluted in some embodiments by acceleration/deceleration timesand overhead. In one embodiment, using queueing to determine the maximumstage velocity V_(SMAX) is an iterative process wherein an overflow of a“link queue” becomes very non-linear as a true maximum velocity isapproached. In such embodiments, more linearity may be introduced by,for example, filtering the link density, calculating a “link flow” for agiven velocity, and calculating an allowable “accumulation” in theprocessing window 1000 given a maximum “processing flow” (PRF multipliedby the link pitch).

To sever any link 1024 within the moving processing window 1000, thepositioning accuracy of the AOD 610 shown in FIG. 6 is sufficientlysmall so as to maintain system accuracy over the entire processingwindow 1000. Present high numeric aperture lenses have a scan field ofapproximately 50 μm. Further, it may be desirable to have a system linkblow accuracy that is better than mean plus 3 sigma<0.18 μm. If, forexample, the AOD 610 contributes approximately 20 nm of systeminaccuracy to an error budget, then the AOD 610 according to oneembodiment has a positioning accuracy of approximately 1 part in 2500.

V. Swath Processing Modes

In one embodiment, the system 600 processes the individual links 1024 inthe processing window 1000 using a single pulse to blow each link 1024.The AOD 610 quickly redirects the position of the focused link pulses tolinks 1024 within the processing window 1000 between two sequentiallaser pulses as the processing window 1000 travels in the scandirection. While a conventional link processing system may blockapproximately one-half to approximately 99% of the pulses produced by avery high PRF laser, the system 600 may use most or all of the pulses.Thus, throughput may be greatly increased without moving the workpiece618 faster.

In addition, or in another embodiment, the system 600 may process asingle location on the workpiece 618 with two or more pulses beforeusing the AOD 610 to direct subsequent pulses to other locations on theworkpiece 618. The system 600 may provide ten, for example, lower energypulses to a link 1024 before redirecting the laser beam to a differentlocation on the workpiece 618. Thus, the system 600 provides aneffective way of directing pulses produced at a very high PRF (e.g., ina range between approximately 1 MHz and approximately 100 MHz) to targetdesired links 1024 with many blows.

If the processing window 1000 moves continuously with respect to theworkpiece 618, the AOD 610 may be used to track according to oneembodiment so as to maintain a stationary relationship between a focusedspot location and a link position while one or more pulses are deliveredto the link 1024. Tracking may also be used to maintain a stationaryrelationship with a plurality of laterally spaced links.

In one embodiment, switching times between locations on the workpiece618 are less than one laser pulse period. In another embodiment, theswitching time is on the order of the laser pulse period. In otherembodiments, the switching time is longer than the switching pulseperiod. Thus, the laser 614 is effectively used if, for example, thesystem 600 processes links 1024 with ten laser pulses and switches fromone link to the next in three or four laser pulse periods.

Rather than delivering all ten pulses (in the example above) to a singlelink 1022, 1024 before switching to a new location (e.g., as theprocessing window 1000 advances in the scan direction shown in FIGS. 10and 11), two or more of the pulses may be delivered to two or morelaterally spaced links 1022, 1024 (e.g., spaced perpendicular to thescan direction). For example, it may be desirable to deliver a singlepulse to each of six laterally spaced links 1022 (one in each of thelink banks 1010, 1012, 1014, 1016, 1018, 1020 shown in FIG. 10). Thus,the AOD 610 may deflect six sequential laser pulses to the six laterallyspaced links 1022 before shifting the processing window 1000 to a newlocation.

FIGS. 12A-12C are timing diagrams 1200, 1210, 1212 illustrating a seriesof laser pulses 1214 in relation to respective repositioning profiles1216, 1218, 1220 according to certain embodiments. An artisan willunderstand from the disclosure herein that the timing diagrams 1200,1210, 1212 shown in FIGS. 12A-12C are provided by way of example onlyand that any combination of pulses delivered per link and pulse periodsused to shift between links may be used. In the embodiment shown in FIG.12A, a single laser pulse is delivered to a link during a blow period.An AOD or a high speed beam deflector (not shown), for example, is thenshifted or repositioned between each pulse during a shift period. Thus,in this example, each laser pulse in the series of laser pulses 1214 isdelivered to a different link.

In the embodiment shown in FIG. 12B, the AOD or high speed beamdeflector uses more time, as compared to the example in FIG. 12A, toshift between each blow period. Specifically, after a first pulse isdelivered to a first link, the AOD or high speed beam deflector shiftsduring three pulse periods before a second pulse is delivered to asecond link. As discussed below, a switch (e.g., an additional AOD and abeam dump) may be used block the unused laser pulses from reaching thesurface of the workpiece during the shift period.

In the embodiment shown in FIG. 12C, a first plurality of pulses (nineshown) are delivered to a first link during a first blow period, the AODor high speed beam deflector shifts during a few pulse periods(approximately three shown), and a second plurality of pulses aredelivered to a second link during a second blow period. In oneembodiment, however, two or more of the first (and/or second) pluralityof pulses may distributed among a plurality of laterally spaced linksduring the first (and/or second) blow periods using a high speeddeflection device such as the AOD 610 discussed above. Thus, pulses maybe efficiently distributed so as to utilize as many of the pulses in theseries of laser pulses 1214 as possible. In one embodiment, the numberof pulses used increases by more than approximately 1% as compared topulses utilized by conventional link processing systems.

Coherent crosstalk may be a problem for laser spots directed to processthe same target on the work surface in areas that either fully orpartially overlap, laser spots that overlap separate targets on the worksurface such that any portion of the beam (e.g., Gaussian tails)overlap, or laser spots that overlap at a detector such as a pulseenergy or reflected pulse energy detector. When Gaussian tails ofdifferent laser spots overlap, for example, crosstalk and interferencein the region between two nearby structures (e.g., links) may result indamage caused by undesirably high optical energy levels. Thus, in theembodiments discussed above, a single laser spot is incident within aprocessing window on a workpiece at a time. Two sequential laser spotsconfigured to spatially overlap on the workpiece do not interfere witheach other, thereby reducing or eliminating coherent crosstalk. However,in other embodiments, multiple spots may be incident within theprocessing window on the workpiece at the same time. For example, two ormore laser beams may be provided through two or more beam paths.

VI. Error Correction

In one embodiment, the AOD 610 shown in FIG. 6 that is used toselectively provide laser pulses to laterally spaced links is also usedto shift the position of a focused laser spot to correct for relativeposition errors that occur in a motion stage. For example, if a planarXY motion stage is used to position a wafer under a focused laser spot,then beam steering may be used to compensate for residual XY stagetracking error (e.g., the instantaneous difference between desiredtrajectory and actual trajectory).

In addition, or in another embodiment, the AOD 610 may be used tocorrect for other types of system errors or disturbances. For example,motion of the focus lens 626 may be sensed so that the AOD 610 maycorrect for any corresponding motion of the spot at the workpiece 618.As another example, the AOD 610 may compensate for beam pointing errorssuch as sensed inaccuracy in the pointing stability of the laser rail.The AOD 610 may also compensate for thermal drift.

In one embodiment, the AOD 610 is driven with closed-loop sensing andfeedback correction. In one such embodiment, the AOD 610 deflectsunwanted or unused pulses to a beam dump that includes a positionsensitive detector (PSD) or quad cell configured to measure the positionof the unused pulses. In addition, or in other embodiments, all pulsesmay be sensed for position and/or energy feedback, not just the dumpedpulses. Thus, thermal drift and/or changes in the AOD's calibration(e.g., calibration to account for thermal drift during particular RFduty cycles) may be detected and corrected by adjusting the amount ofdeflection provided by the AOD 610.

In another embodiment, one or more additional laser beams may be passedthrough the AOD 610 to determine how they are deflected. For example, inaddition to the laser beam used to sever links, a continuous-wave (CW)laser such as a helium neon laser may be positioned so that its beampasses through the AOD 610. At least a portion of the resulting CW beammay then be directed to a PSD or quad cell for detecting drift and/or toprovide feedback to the AOD 610.

VII. Example System Embodiments

As discussed above, FIG. 6 illustrates one embodiment of a laserprocessing system 600. However, other system configurations andcomponents will occur to an artisan upon reading the disclosure herein.For example, FIGS. 13-17 provide additional example embodimentsdiscussed below.

In FIGS. 6 and 13-17 a wide variety of lasers 614 and different laserpulse properties may be selected to favorably improve the processing ofsemiconductor link structures. These laser sources 614 may include solidstate lasers, such as diode-pumped q-switched solid state lasers,including lasers comprising rare-earth-doped lasants such as Nd:YVO₄,Nd:YLF, and Nd:YAG and vibronic lasants such as alexandrite, Cr:LiSAF,and Cr:LiCAF. The fundamental wavelength output of these lasers 614 maybe converted to harmonic wavelengths through the well-known process ofnonlinear harmonic conversion.

These laser sources 614 may further include diode-pumped mode-lockedsolid state lasers, such as, SESAM mode-locked Nd:YVO₄ lasers capable ofproducing pulsed picosecond laser output. Mode-locked solid state lasersmay include oscillator-regenerative amplifier and oscillator-poweramplifier configurations. The fundamental wavelength output of theselasers may be converted to harmonic wavelengths through the well-knownprocess of nonlinear harmonic conversion. The laser sources 614 may alsoinclude chirped pulse amplification laser systems for the generation offemtosecond (fs) laser output or may alternatively include other pulsestretching and compression optics well-known to the art for the purposeof generating pulsed femtosecond laser output.

These laser sources 614 may further include pulsed rare earth-dopedsolid core fiber lasers and pulsed rare-earth-doped photonic crystalfiber lasers. Pulsed rare-earth-doped fiber lasers may includeq-switched and oscillator-amplifier configurations. Further, a widevariety of oscillators may be employed, including broad areasemiconductor lasers, single-frequency semiconductor lasers, lightemitting diodes, q-switched solid state lasers, and fiber lasers. Thefundamental wavelength output of these lasers may be converted toharmonic wavelengths through the well-known process of nonlinearharmonic conversion.

Additional laser sources 614 may further include semiconductor lasers,gas lasers, including CO₂ and argon-ion lasers, and excimer lasers.

The laser sources 614 may produce a wide range of wavelengths, fromabout 150 nm to about 11,000 nm. Depending on the laser sources 614employed, pulse widths ranging from about 10 fs to greater than about 1μs and PRFs ranging from pulse-on-demand to greater than about 100 MHzmay be produced. Depending on the laser sources 614 employed, the pulseshape, energy per pulse or output power, pulsewidth, polarization,and/or wavelength may be tunable or selectable.

Ultra fast lasers, which deliver numerous pulses in rapid succession toprocess a link, may also be used. In addition to use in the system likeany other laser source, the generating and blocking of pulses in asystem employing an ultra fast laser can be coordinated to allowdifferent pulse sequences to be delivered down each of multiple beampaths (see FIGS. 15-17). For example, more or fewer pulses may bepermitted to pass down one of the beam paths for delivery to a link.Pulses may also be delivered in bursts or delivered alternating down thedifferent beam paths. An offset or adjustment in the laser spot locationrelative to the workpiece in one or more of the multiple beam paths canalso be created by allowing a temporally different set of laser pulsesto reach the target links.

FIG. 13 is a schematic diagram of a laser processing system 1300comprising two deflection devices according to one embodiment. Thesystem 1300 includes the laser 614, switch 616, AOD 610, relay lens 622,mirror 624, and focus lens 626 discussed in relation to FIG. 6. However,the system 1300 also includes another AOD 1312 and another relay lens1314 in the beam path.

In one embodiment, the AOD 610 is configured to deflect the laser beamin the X-direction and the AOD 1312 is configured to deflect the laserbeam in the Y-direction. The relay lens 622 images the laser beam fromthe AOD 610 to the AOD 1312. The relay lens 1314 images the laser beamfrom the AOD 1312 to the mirror 624. Thus, the system 1300 may redirectlaser pulses in two directions. In one embodiment, however, the AOD 610shown in FIG. 6 comprises a single device capable of deflecting thelaser beam in two directions.

FIG. 14 is a schematic diagram of a laser processing system 1400including a telecentric angle detector 1414 according to one embodiment.In this embodiment, a partially transparent mirror 1410 directs aportion of the laser beam to the focus lens 626 and a portion of thelaser beam to the telecentric angle detector 1414 through an additionalrelay lens 1412. The telecentric angle detector 1414 may include a quadcell, a PSD, or a camera detector configured to detect beam angle.

As discussed above, the telecentric angle detector 1414 may be used toprovide feedback to one or both of the AODs 610, 1312 for errorcorrection and/or calibration.

Although the systems 600, 1300, 1400 shown respectively in FIGS. 6, 13,14 include single beam paths, multiple beam path systems may also beused. For example, FIG. 15 is a schematic diagram of dual-beam pathlaser processing system 1500 according to one embodiment. In thisembodiment, a high speed beam deflector 1510 directs the laser beam to afirst optical path including a first XY beam steering mechanism 1512, arelay lens 1514, and a beam combiner 1516. The beam deflector 1510 alsodirects the laser beam to a second optical path including a mirror 1518,a second XY beam steering mechanism 1520, a relay lens 1522, and thebeam combiner 1516. The first optical path and the second optical pathresult in configurable link blow locations. The configuration may bestatic or changed with a beam deflection technology such aspiezoelectric fast steering mirrors, multiple-beam actuators or otherquick beam actuators. The configuration may also be changed with slowlymoving configurable optics elements such as motorized mirrors and tiltplates.

The embodiment shown in FIG. 15 may be desirable, for example, when thehigh speed beam deflector 1510 can be used to separate pulses, but notfor complete beam steering. For example, beam steering with an AOD mayprovide steering in a single direction (e.g., X-axis). By having twooptical paths, deflection provided by an AOD (which may also be used forthe switch 616) separates the series of pulses between the first opticalpath and the second optical path. Then, configurable optics in each pathdirect the pulses to desired blow locations on the workpiece 618. In oneembodiment, the system 1500 provides the pulses serially such that oneand only one beam spot is on the workpiece 618 at a time. In anotherembodiment, the system 1500 provides two beam spots (e.g., one from eachpath) on the workpiece 618 at the same time.

FIG. 16 is a schematic diagram of a dual-path laser processing system1600 according to another embodiment. The system 1600 includes a beamsplitter 1610 configured to direct a portion of the laser beam down afirst optical path including a first switch 616, a first XY beamsteering mechanism 1512, a first relay lens 1514, additional opticelements 1612, if any, and a beam combiner 1516. The beam splitter 1610also directs a portion of the laser beam down a second optical pathincluding a second switch 616, a second XY beam steering mechanism 1520,a second relay lens 1522, additional optic elements 1612, if any, andthe beam combiner 1516. The beam splitter 1610 may include bulk opticssuch as polarizing beam splitter cubes or partially reflecting mirrors.AODs, EODs, and switchable liquid crystal display (LCD) polarizers mayalso be configured and driven to perform beam splitting. Alternatively,fiber optic couplers may serve as a beam splitter in fiber-opticimplementations.

The additional optic elements 1612 in each path, which are optional, maybe included to shape or change the optical properties of the beams andmay include, for example, polarizers, polarization modifiers, faradayisolators, spatial beam profile modifiers, temporal beam profilemodifiers, frequency shifters, frequency-multiplying optics,attenuators, pulse amplifiers, mode-selecting optics, beam expanders,lenses, and relay lenses. Additional optic elements may also includedelay lines that include an extra optical path distance, folded opticalpaths, and fiber-optic delay lines.

In one embodiment, the system 1600 is operated such that only one spotat a time is allowed on the workpiece 618. In another embodiment, thesystem 1600 is operated such that two beam spots are on the workpiece618 at the same time. In one such embodiment, the two spots are notoverlapped to avoid excessive or uniform thermal effects. An artisanwill recognize that the system 1600 may be generalized for more than twobeam paths.

FIG. 17 is a schematic diagram of a fiber optic laser processing system1700 according to one embodiment. In this embodiment, a laser 614 iscoupled to a fiber optic cable 1710 that provides a series of laserpulses to a fiber optic switch 1712. The switch 1712 selectively directslaser pulses down fiber optic 1710 beam paths. In this example, both afirst and a second beam path include an actuator 1714 coupled toconditioning and steering optics 1716, and a relay lens 1718. A thirdbeam path may include, for example, an optical device 1720 such as abeam dump or detector.

The first and second beam paths include a shared beam combiner 1720 andare configured to provide laser pulses to two different spot locationson the workpiece 618. The actuated beam conditioning optics 1716 areconfigured to change the position and slope of a conditioned beamemitted from the fiber optics 1710, combine them, and deliver them tothe workpiece 618.

An artisan will recognize from the disclosure herein numerous otherembodiments of laser systems that may be used for single beam path andsplit beam path processing of a plurality of laterally spaced link runsin a single pass. Certain embodiments, for example, may include hybridsystems that use a deflector element to make a two-path system into aneffective serialized four spot system. As with other dual-beam systems,different configurations of relative spot locations may be implementedor commanded. Spots may fully or partially overlap, have an on-axisspacing, a cross-axis spacing, or both an on-axis and cross-axisspacing.

It will be obvious to those having skill in the art that many changesmay be made to the details of the above-described embodiments withoutdeparting from the underlying principles of the invention. The scope ofthe present invention should, therefore, be determined only by thefollowing claims.

1-15. (canceled)
 16. A system for processing structures on or within asemiconductor substrate, the system comprising: a laser sourceconfigured to generate a series of laser pulses; a first deflectorconfigured to receive the series of laser pulses and to selectivelydeflect the series of laser pulses within a processing window; and amotion stage configured to scan the processing window with respect tothe semiconductor substrate, a plurality of laterally spaced rows ofstructures simultaneously passing through the processing window as theprocessing window is scanned, wherein the first deflector comprises aswitching time of 100 μs or less, wherein, as the processing window isscanned over the semiconductor substrate in a scan direction, the firstdeflector is further configured to selectively deflect the series oflaser pulses among the laterally spaced rows within the processingwindow, and wherein, with respect to the scan direction, at least onepulse series of laser pulses is deflected in a reverse direction andlaterally.
 17. The system of claim 16, wherein the first deflector isfurther configured to deflect the series of laser pulses in a firstdirection and in a second direction, wherein the first direction issubstantially perpendicular to the scanning direction of the processingwindow, and wherein the second direction is substantially parallel tothe scanning direction.
 18. The system of claim 16, wherein the firstdeflector comprises an acousto-optic deflector configured to deflect theseries of laser pulses within a deflection angle range of +/−4 mradians.19. The system of claim 18, wherein the acousto-optic deflector isfurther configured to selectively provide a precision of 0.8 μradianswithin the deflection angle range.
 20. The system of claim 16, whereinthe first deflector comprises an electro-optic deflector.
 21. The systemof claim 16, further comprising a lens configured to focus the series oflaser pulses onto the semiconductor substrate.
 22. The system of claim16, wherein the motion stage is further configured to continuously movethe processing window with respect to the semiconductor substrate from afirst end of the plurality of laterally spaced rows to a second end ofthe laterally spaced rows.
 23. The system of claim 22, wherein themotion stage is further configured to move the processing window withrespect to the semiconductor substrate at a constant velocity.
 24. Thesystem of claim 22, wherein the motion stage is further configured tovary a scanning velocity based on a changing number of structures in thelaterally spaced rows currently passing through the processing window.25. The system of claim 24, wherein the motion stage is furtherconfigured to accelerate the scanning velocity when one or more of thelaterally spaced rows comprises a relative gap between successivestructures.
 26. The system of claim 16, wherein the motion stage isfurther configured to step the processing window between a firstlocation relative to the semiconductor substrate and a second locationrelative to the semiconductor substrate, the first locationcorresponding to a first subset of structures and the second locationcorresponding to a second subset of structures.
 27. The system of claim26, wherein the first deflector is further configured to: while theprocessing window is at the first location, selectively deflect theseries of laser pulses to a first structure in the first subset ofstructures; and while the processing window is at the second location,selectively deflect the series of laser pulses among the second subsetof structures.
 28. The system of claim 16, wherein the first deflectoris further configured to: deflect a first laser pulse from the series oflaser pulses to a first structure in a first row, the first structurebeing within the processing window; and deflect a second laser pulsefrom the series of laser pulses to a second structure in a second row,the second laser pulse immediately following the first laser pulse inthe series of laser pulses.
 29. The system of claim 16, furthercomprising a second deflector configured to: receive the deflected laserpulses from the first deflector, the first deflector configured todeflect the laser pulses in a first direction; and deflect the laserpulses in a second direction.
 30. The system of claim 29, wherein thefirst direction is substantially perpendicular to the scanning directionof the processing window moving with respect to the semiconductorsubstrate.
 31. The system of claim 30, wherein the second direction issubstantially parallel to the scanning direction.
 32. A laser processingsystem comprising: a laser source configured to generate a series oflaser pulses; a motion stage configured to move a processing window withrespect to a workpiece; and a deflector configured to deflect, as theprocessing window moves over the workpiece in a first direction, a firstlaser pulse to a first structure on the workpiece within the processingwindow and a second laser pulse to a second structure on the workpiecewithin the processing window, the second laser pulse being subsequent tothe first laser pulse in the series of laser pulses, wherein, withrespect to the first direction, the second laser pulse is deflected in areverse direction and laterally, and wherein the deflector is furtherconfigured to deflect the second laser pulse to the second structurewithin 100 μs after deflecting the first laser pulse to the firststructure.
 33. The system of claim 32, wherein the motion stage isfurther configured to move the processing window in the first directionwith respect to the workpiece, and wherein the deflector is furtherconfigured to deflect the series of laser pulses in a second directionwith respect to the workpiece.
 34. The system of claim 33, wherein thedeflector is further configured to deflect the series of laser pulses inthe first direction.
 35. The system of claim 32, wherein the firststructure is not adjacent to the second structure.
 36. The system ofclaim 32, wherein the deflector is selected from the group comprising anacousto-optic deflector and an electro-optic deflector. 37-40.(canceled)
 41. A non-transitory computer readable medium comprising aplurality of program instructions stored thereon that, when executed bya computer, cause the computer to perform a method for processingstructures on or within a semiconductor substrate, the methodcomprising: providing a series of laser pulses to a first deflectorconfigured to selectively deflect the laser pulses within a processingwindow; scanning the processing window over the semiconductor substrate,a plurality of laterally spaced rows of structures simultaneouslypassing through the processing window as the processing window isscanned; and selectively deflecting the series of laser pulses among theplurality of laterally spaced rows within the processing window,wherein, as the processing window is scanned over the semiconductorsubstrate in a scan direction, a first laser pulse is deflected to afirst row of the laterally spaced rows and a second laser pulse isdeflected to a second row of the laterally spaced rows, the second laserpulse being subsequent to the first laser pulse in the series of laserpulses, wherein, with respect to the scan direction, the second laserpulse is deflected in a reverse direction and laterally, and wherein thesecond laser pulse is deflected to the second row within 100 μs afterthe first laser pulse is deflected to the first row.
 42. Thenon-transitory computer readable medium of claim 41, wherein the firstlaser pulse and the second laser pulse are consecutive laser pulses inthe series of laser pulses.
 43. The non-transitory computer readablemedium of claim 41, wherein the first laser pulse is deflected to afirst structure in the first row and the second laser pulse is deflectedto a second structure in the second row, and wherein the first structureand the second structure are laterally aligned such that a straight linepasses through both the first structure and the second structure, thestraight line being perpendicular to a scanning direction of theprocessing window.
 44. The non-transitory computer readable medium ofclaim 41, wherein the first deflector is configured to deflect theseries of laser pulses in a first direction and in a second direction,wherein the first direction is substantially perpendicular to a scanningdirection of the processing window, and wherein the second direction issubstantially parallel to the scanning direction.
 45. The non-transitorycomputer readable medium of claim 41, wherein the first deflector isselected from a group comprising an acousto-optic deflector and anelectro-optic deflector.
 46. The non-transitory computer readable mediumof claim 41, wherein scanning the processing window comprisescontinuously moving the processing window with respect to thesemiconductor substrate from a first end of the plurality of laterallyspaced rows to a second end of the laterally spaced rows.
 47. Thenon-transitory computer readable medium of claim 46, whereincontinuously moving the processing window comprises moving theprocessing window with respect to the semiconductor substrate at aconstant velocity.
 48. The non-transitory computer readable medium ofclaim 46, wherein continuously moving the processing window comprisesvarying a scanning velocity based on a changing number of structures inthe laterally spaced rows currently passing through the processingwindow.
 49. The non-transitory computer readable medium of claim 48,wherein varying the scanning velocity comprises accelerating thescanning velocity when one or more of the laterally spaced rowscomprises a relative gap between successive structures.
 50. Thenon-transitory computer readable medium of claim 41, wherein scanningthe processing window comprises stepping the processing window between afirst location relative to the semiconductor substrate and a secondlocation relative to the semiconductor substrate, the first locationcorresponding to a first subset of structures and the second locationcorresponding to a second subset of structures.
 51. The non-transitorycomputer readable medium of claim 50, wherein selectively deflecting theseries of laser pulses comprises: while the processing window is at thefirst location, selectively deflecting the series of laser pulses amongthe first subset of structures; and while the processing window is atthe second location, selectively deflecting the series of laser pulsesamong the second subset of structures.
 52. The non-transitory computerreadable medium of claim 41, further comprising providing the deflectedlaser pulses from the first deflector to a second deflector, the firstdeflector configured to deflect the laser pulses in a first directionand the second deflector configured to deflect the laser pulses in asecond direction.
 53. The non-transitory computer readable medium ofclaim 52, wherein the first direction is substantially perpendicular toa scanning direction of the processing window moving with respect to thesemiconductor substrate.
 54. The non-transitory computer readable mediumof claim 53, wherein the second direction is substantially parallel tothe scanning direction.